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Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode
Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode
Fabrication of smooth -SiC surfaces by reactive ion etching using a graphite electrode
Reichert, W. (Autor:in) / Stefan, D. (Autor:in) / Obermeier, E. (Autor:in) / Wondrak, W. (Autor:in) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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