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Exact evaluation of channel mobility for trench MOSFET using split C-V method
Exact evaluation of channel mobility for trench MOSFET using split C-V method
Exact evaluation of channel mobility for trench MOSFET using split C-V method
Yahata, A. (Autor:in) / Inoue, T. (Autor:in) / Ohashi, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 117/118 ; 181-186
01.01.1997
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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