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Exact evaluation of channel mobility for trench MOSFET using split C-V method
Exact evaluation of channel mobility for trench MOSFET using split C-V method
Exact evaluation of channel mobility for trench MOSFET using split C-V method
Yahata, A. (author) / Inoue, T. (author) / Ohashi, H. (author)
APPLIED SURFACE SCIENCE ; 117/118 ; 181-186
1997-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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