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Fluence Dependence of the Formation of Open-Volume Defects in Silicon After Ion Implantation
Fluence Dependence of the Formation of Open-Volume Defects in Silicon After Ion Implantation
Fluence Dependence of the Formation of Open-Volume Defects in Silicon After Ion Implantation
Eichler, S. (Autor:in) / Boerner, F. (Autor:in) / Gebauer, J. (Autor:in) / Krause-Rehberg, R. (Autor:in) / Jean, Y. C. / Eldrup, M. / Schrader, D. M. / West, R. N.
01.01.1997
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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