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Vacancy-type defects in 6H-SiC caused by N+ and Al+ high fluence co-implantation
Vacancy-type defects in 6H-SiC caused by N+ and Al+ high fluence co-implantation
Vacancy-type defects in 6H-SiC caused by N+ and Al+ high fluence co-implantation
Anwand, W. (Autor:in) / Brauer, G. (Autor:in) / Skorupa, W. (Autor:in)
APPLIED SURFACE SCIENCE ; 194 ; 131-135
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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