Coimplantation Effects of (C and Si)/Ga in 6H-SiC

Tanaka, Y. / Kobayashi, N. / Hasegawa, M. et al. | British Library Online Contents | 2000

Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

Emtsev Jr, V. V. / Poloskin, D. S. / Shek, E. I. et al. | British Library Online Contents | 2001

Wear of steels after implantation of aluminium and coimplantation of aluminium and oxygen ions

Langguth, K. / Ryssel, H. | British Library Online Contents | 1993

X-Band ENDOR of Boron and Beryllium Acceptors in Silicon Carbide

Hofstaetter, A. / Meyer, B. K. / Scharmann, A. et al. | British Library Online Contents | 1998

Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions

Ohshima, T. / Itoh, H. / Yoshikawa, M. | British Library Online Contents | 2001