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Hot-Implantation of Phosphorus Ions into 6H-SiC
Hot-Implantation of Phosphorus Ions into 6H-SiC
Hot-Implantation of Phosphorus Ions into 6H-SiC
Abe, K. (Autor:in) / Ohshima, T. (Autor:in) / Itoh, H. (Autor:in) / Aoki, Y. (Autor:in) / Yoshikawa, M. (Autor:in) / Nashiyama, I. (Autor:in) / Iwami, M. (Autor:in)
MATERIALS SCIENCE FORUM ; 264/268 ; 721-724
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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