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Hot-Implantation of Phosphorus Ions into 4H-SiC
Hot-Implantation of Phosphorus Ions into 4H-SiC
Hot-Implantation of Phosphorus Ions into 4H-SiC
Imai, S. (Autor:in) / Kobayashi, S. (Autor:in) / Shinohe, T. (Autor:in) / Fukuda, K. (Autor:in) / Tanaka, Y. (Autor:in) / Senzaki, J. (Autor:in) / Tanoue, H. (Autor:in) / Kobayashi, N. (Autor:in) / Okushi, H. (Autor:in)
MATERIALS SCIENCE FORUM ; 338/342 ; 861-864
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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