Hot-Implantation of Phosphorus Ions into 6H-SiC: Fid-Bau Portal

Hot-Implantation of Phosphorus Ions into 6H-SiC

Abe, K. / Ohshima, T. / Itoh, H. / Aoki, Y. / Yoshikawa, M. / Nashiyama, I. / Iwami, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Hot-Implantation of Phosphorus Ions into 6H-SiC

Abe, K. / Ohshima, T. / Itoh, H. / Aoki, Y. / Yoshikawa, M. / Nashiyama, I. / Iwami, M.

Hot-Implantation of Phosphorus Ions into 6H-SiC

Abe, K. / Ohshima, T. / Itoh, H. / Aoki, Y. / Yoshikawa, M. / Nashiyama, I. / Iwami, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Hot-Implantation of Phosphorus Ions into 6H-SiC

Contributors:

Abe, K. (author) / Ohshima, T. (author) / Itoh, H. (author) / Aoki, Y. (author) / Yoshikawa, M. (author) / Nashiyama, I. (author) / Iwami, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 721-724

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Imai, S. / Kobayashi, S. / Shinohe, T. et al. | British Library Online Contents | 2000

Phosphorus Ion Implantation into 4H-SiC (0001) and (11&unknown;20)

Negoro, Y. / Miyamoto, N. / Kimoto, T. et al. | British Library Online Contents | 2002

Ultrashort electron emission improved by alkali ions implantation into metallic photocathodes

Afif, M. / Girardeau-Montaut, J. P. / Tomas, C. et al. | British Library Online Contents | 1997

Ion implantation into GaN

Kucheyev, S. O. / Williams, J. S. / Pearton, S. J. | British Library Online Contents | 2001

Phosphorus diffusion in germanium following implantation and excimer laser annealing

Wang, C. / Li, C. / Huang, S. et al. | British Library Online Contents | 2014