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    X-ray photoelectron study in the initial stage of oxynitridation process by excited nitrogen and oxygen

    New search for: Saito, Y.
    New search for: Iguchi, S.

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    X-ray photoelectron study in the initial stage of oxynitridation process by excited nitrogen and oxygen

    New search for: Saito, Y.
    New search for: Iguchi, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    X-ray photoelectron study in the initial stage of oxynitridation process by excited nitrogen and oxygen

    New search for: Saito, Y.
    New search for: Iguchi, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    X-ray photoelectron study in the initial stage of oxynitridation process by excited nitrogen and oxygen

    Contributors:

    Saito, Y. (author) / Iguchi, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 130-132 ; 187-191

    Publication date:

    1998-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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