Atomic-layer chemical-vapor-deposition of silicon-nitride

Morishita, S. / Sugahara, S. / Matsumura, M. | British Library Online Contents | 1997

Initial stage of oxidation of hydrogen-terminated silicon surfaces

Hattori, T. / Aiba, T. / Iijima, E. et al. | British Library Online Contents | 1996

Selective atomic layer deposition of MoSix on Si (0 0 1) in preference to silicon nitride and silicon oxide

Choi, Jong Youn / Ahles, Christopher F. / Hung, Raymond et al. | British Library Online Contents | 2018

Atomic control of Si-terminated cubic silicon carbide (100) surfaces: morphology and self-organized atomic lines

Soukiassian, P. | British Library Online Contents | 1999

Silicon-kicking-out mechanism in initial oxide formation on hydrogen-terminated silicon (100) surfaces

Kageshima, H. / Shiraishi, K. | British Library Online Contents | 1998