Physical properties of a-C:H films prepared by electron cyclotron resonance microwave plasma chemical vapor deposition

Zhou, X. T. / Lee, S. T. / Bello, I. et al. | British Library Online Contents | 2000

Effects of microwave power and bias voltage on deposition of amorphous hydrogenated carbon films using electron cyclotron resonance plasma chemical vapour deposition

Maruyama, K. / Inoue, T. / Yamamoto, M. et al. | British Library Online Contents | 1994

Biased Electron Cyclotron Resonance Chemical-Vapor Deposition of Silicon Dioxide Inter-Metal Dielectric Thin Films

Shufflebotham, P. / Weise, M. / Pirkle, D. et al. | British Library Online Contents | 1993

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

Thomas, R. / Rao, G. M. | British Library Online Contents | 2012