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Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power
Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power
Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power
Yoon, S. F. (author) / Ji, R. (author) / Ahn, J. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 29-38
1999-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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