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    Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power

    New search for: Yoon, S. F.
    New search for: Ji, R.
    New search for: Ahn, J.

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    Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power

    New search for: Yoon, S. F.
    New search for: Ji, R.
    New search for: Ahn, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power

    New search for: Yoon, S. F.
    New search for: Ji, R.
    New search for: Ahn, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Preparation of boron and phosphorus-doped SiC: H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power

    Contributors:

    Yoon, S. F. (author) / Ji, R. (author) / Ahn, J. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 29-38

    Publication date:

    1999-01-01

    Size:

    10 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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