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Formation of TiSi~2 on nitrogen ion implanted (001)Si
Formation of TiSi~2 on nitrogen ion implanted (001)Si
Formation of TiSi~2 on nitrogen ion implanted (001)Si
Cheng, S. L. (Autor:in) / Chen, L. J. (Autor:in) / Tsui, B. Y. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 213-221
01.01.1999
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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British Library Online Contents | 1999
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British Library Online Contents | 1999
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