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Formation of TiSi~2 on nitrogen ion implanted (001)Si
Formation of TiSi~2 on nitrogen ion implanted (001)Si
Formation of TiSi~2 on nitrogen ion implanted (001)Si
Cheng, S. L. (author) / Chen, L. J. (author) / Tsui, B. Y. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 213-221
1999-01-01
9 pages
Article (Journal)
English
DDC:
620.11
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