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Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer
Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer
Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer
Cheng, S. L. (Autor:in) / Jou, J. J. (Autor:in) / Chen, L. J. (Autor:in) / Tsui, B. Y. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 2061-2069
01.01.1999
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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