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Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge
Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge
Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge
Das, D. (Autor:in) / Mandal, S. (Autor:in) / Barua, A. K. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 2097-2100
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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