The Study of Microcrystalline Silicon Thin Films Prepared by PECVD

Li, C.Y. / Zhang, H. / Li, J. et al. | British Library Online Contents | 2013

Intrinsic hydrogenated microcrystalline silicon oxide films prepared by RF glow discharge

Das, D. / Mandal, S. / Barua, A. K. | British Library Online Contents | 1998

Role of hydrogen in the peeling of hydrogenated microcrystalline silicon films

Pham, N. / Djeridane, Y. / Abramov, A. et al. | British Library Online Contents | 2009

Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

Coscia, U. / Ambrosone, G. / Gesuele, F. et al. | British Library Online Contents | 2007

Experimental Investigation of Microstructure and Piezoresistive Properties of Phosphorus-Doped Hydrogenated Nanocrystalline Silicon Thin Films Prepared by PECVD

Pan, H.B. / Ding, J.N. / Cheng, G.G. et al. | British Library Online Contents | 2014