Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer: Fid-Bau Portal

Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer

Cheng, S. L. / Jou, J. J. / Chen, L. J. / Tsui, B. Y.

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Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer

Cheng, S. L. / Jou, J. J. / Chen, L. J. / Tsui, B. Y.

Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer

Cheng, S. L. / Jou, J. J. / Chen, L. J. / Tsui, B. Y.

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Title:

Formation of C54-TiSi~2 in titanium on nitrogen-ion-implanted (001)Si with a thin interposing Mo layer

Contributors:

Cheng, S. L. (author) / Jou, J. J. (author) / Chen, L. J. (author) / Tsui, B. Y. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 2061-2069

Publication date:

1999-01-01

Size:

9 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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