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Nitrogen implantation in 4H and 6H-SiC
Nitrogen implantation in 4H and 6H-SiC
Nitrogen implantation in 4H and 6H-SiC
Gimbert, J. (Autor:in) / Billon, T. (Autor:in) / Ouisse, T. (Autor:in) / Grisolia, J. (Autor:in) / Ben-Assayag, G. (Autor:in) / Jaussaud, C. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 368 - 372
01.01.1999
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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