Nitrogen implantation in 4H and 6H-SiC: Fid-Bau Portal

Nitrogen implantation in 4H and 6H-SiC

Gimbert, J. / Billon, T. / Ouisse, T. / Grisolia, J. / Ben-Assayag, G. / Jaussaud, C.

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Nitrogen implantation in 4H and 6H-SiC

Gimbert, J. / Billon, T. / Ouisse, T. / Grisolia, J. / Ben-Assayag, G. / Jaussaud, C.

Nitrogen implantation in 4H and 6H-SiC

Gimbert, J. / Billon, T. / Ouisse, T. / Grisolia, J. / Ben-Assayag, G. / Jaussaud, C.

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Document information

Title:

Nitrogen implantation in 4H and 6H-SiC

Contributors:

Gimbert, J. (author) / Billon, T. (author) / Ouisse, T. (author) / Grisolia, J. (author) / Ben-Assayag, G. (author) / Jaussaud, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 368 - 372

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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