Two-dimensional dopant profiling by scanning capacitance force microscopy

Kimura, K. / Kobayashi, K. / Yamada, H. et al. | British Library Online Contents | 2003

Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors

Kopanski, J. J. / Marchiando, J. F. / Lowney, J. R. | British Library Online Contents | 1997

Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V. / Giannazzo, F. / Calcagno, L. et al. | British Library Online Contents | 2002

Dopant profile measurements in ion implanted 6H-SiC by scanning capacitance microscopy

Giannazzo, F. / Calcagno, L. / Roccaforte, F. et al. | British Library Online Contents | 2001

Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis

Henning, A. K. / Hochwitz, T. | British Library Online Contents | 1996