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Two-dimensional dopant profiling by scanning capacitance force microscopy
Two-dimensional dopant profiling by scanning capacitance force microscopy
Two-dimensional dopant profiling by scanning capacitance force microscopy
Kimura, K. (Autor:in) / Kobayashi, K. (Autor:in) / Yamada, H. (Autor:in) / Matsushige, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 210 ; 93-98
01.01.2003
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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