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Mechanical stress reduction in PECVD a-Si:H thin films
Mechanical stress reduction in PECVD a-Si:H thin films
Mechanical stress reduction in PECVD a-Si:H thin films
Garrido Alzar, C.L. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 65 ; 123 - 126
1999-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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