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Mechanical stress reduction in PECVD a-Si:H thin films

Garrido Alzar, C.L.

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Mechanical stress reduction in PECVD a-Si:H thin films

Garrido Alzar, C.L.

Mechanical stress reduction in PECVD a-Si:H thin films

Garrido Alzar, C.L.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical stress reduction in PECVD a-Si:H thin films

Contributors:

Garrido Alzar, C.L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 65 ; 123 - 126

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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