Effects of microwave power and bias voltage on deposition of amorphous hydrogenated carbon films using electron cyclotron resonance plasma chemical vapour deposition

Maruyama, K. / Inoue, T. / Yamamoto, M. et al. | British Library Online Contents | 1994

Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

Wang, Y. / Lin, J. / Feng, Z. C. et al. | British Library Online Contents | 2000

Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

Thomas, R. / Rao, G. M. | British Library Online Contents | 2012

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Durand-Drouhin, O. / Lejeune, M. / Bouzerar, R. et al. | British Library Online Contents | 2001