Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Schmidt, D.C. / Barbot, J.F. / Blanchard, C. et al. | British Library Online Contents | 2000

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

Modifications of He implantation induced cavities in silicon by MeV silicon implantation

Desgardin, P. / Barthe, M. F. / Ntsoenzok, E. et al. | British Library Online Contents | 2006

Gettering issues using MeV ion implantation

Rozgonyi, G. A. / Glasko, J. M. / Beaman, K. L. et al. | British Library Online Contents | 2000

Helium desorption from cavities induced by high energy 3He and 4He implantation in silicon

Godey, S. / Ntsoenzok, E. / Sauvage, T. et al. | British Library Online Contents | 2000