Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions: Fid-Bau Portal

Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Mariani-Regula, G. / Pichaud, B. / Godey, S. / Ntsoenzok, E. / Perner, O. / El Bouayadi, R.

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Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Mariani-Regula, G. / Pichaud, B. / Godey, S. / Ntsoenzok, E. / Perner, O. / El Bouayadi, R.

Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Mariani-Regula, G. / Pichaud, B. / Godey, S. / Ntsoenzok, E. / Perner, O. / El Bouayadi, R.

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Title:

Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Contributors:

Mariani-Regula, G. (author) / Pichaud, B. (author) / Godey, S. (author) / Ntsoenzok, E. (author) / Perner, O. (author) / El Bouayadi, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 203 - 206

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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