Modifications of He implantation induced cavities in silicon by MeV silicon implantation

Desgardin, P. / Barthe, M. F. / Ntsoenzok, E. et al. | British Library Online Contents | 2006

Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Mariani-Regula, G. / Pichaud, B. / Godey, S. et al. | British Library Online Contents | 2000

Helium and hydrogen-decorated cavities in silicon

Hakvoort, R. A. / Van Veen, A. / Mijnarends, P. E. et al. | British Library Online Contents | 1995

Helium implantation in silicon: the effects of implantation temperature

Oliviero, E. / David, M. L. / Fedorov, A. V. et al. | British Library Online Contents | 2003

Boron diffusion in presence of defects induced by helium implantation

Cayrel, F. / Alquier, D. / Dubois, C. et al. | British Library Online Contents | 2005