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Substrate defects affecting gate oxide integrity
Substrate defects affecting gate oxide integrity
Substrate defects affecting gate oxide integrity
Itsumi, M. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 184 - 190
01.01.2000
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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British Library Online Contents | 1995
|Gate oxide integrity dependence on substrate characteristics and SiO2 thickness
British Library Online Contents | 2001
|Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity
British Library Online Contents | 1995
|Thickness dependent integrity of gate oxide on SOI
British Library Online Contents | 2003
|