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Thickness dependent integrity of gate oxide on SOI
Thickness dependent integrity of gate oxide on SOI
Thickness dependent integrity of gate oxide on SOI
Tsujiuchi, M. (Autor:in) / Iwamatsu, T. (Autor:in) / Naruoka, H. (Autor:in) / Umeda, H. (Autor:in) / Ipposhi, T. (Autor:in) / Maegawa, S. (Autor:in) / Inoue, Y. (Autor:in)
APPLIED SURFACE SCIENCE ; 216 ; 329-333
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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