Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering: Fid-Bau Portal

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Shen, Y. G. / Mai, Y. W.

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Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Shen, Y. G. / Mai, Y. W.

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Shen, Y. G. / Mai, Y. W.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

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Titel:

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Beteiligte:

Shen, Y. G. (Autor:in) / Mai, Y. W. (Autor:in)

Erschienen in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 76 ; 107 - 115

Erscheinungsdatum:

01.01.2000

Format / Umfang:

9 pages

ISSN:

0921-5107

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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