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Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

Guruvenket, S. / Mohan Rao, G.

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Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

Guruvenket, S. / Mohan Rao, G.

Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

Guruvenket, S. / Mohan Rao, G.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

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Dokumentinformationen

Titel:

Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

Beteiligte:

Guruvenket, S. (Autor:in) / Mohan Rao, G. (Autor:in)

Erschienen in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 106 ; 172-176

Erscheinungsdatum:

01.01.2004

Format / Umfang:

5 pages

ISSN:

0921-5107

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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