Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering: Fid-Bau Portal

Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering

Shen, Y. G. / Liu, Z.-J. / Jiang, N. / Zhang, H. S. / Chan, K. H. / Xu, Z. K.

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Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering

Shen, Y. G. / Liu, Z.-J. / Jiang, N. / Zhang, H. S. / Chan, K. H. / Xu, Z. K.

Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering

Shen, Y. G. / Liu, Z.-J. / Jiang, N. / Zhang, H. S. / Chan, K. H. / Xu, Z. K.

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Titel:

Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering

Beteiligte:

Shen, Y. G. (Autor:in) / Liu, Z.-J. (Autor:in) / Jiang, N. (Autor:in) / Zhang, H. S. (Autor:in) / Chan, K. H. (Autor:in) / Xu, Z. K. (Autor:in)

Erschienen in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 523-534

Erscheinungsdatum:

01.01.2004

Format / Umfang:

12 pages

ISSN:

0884-2914

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

Jeyachandran, Y. L. / Narayandass, S. K. / Mangalaraj, D. et al. | British Library Online Contents | 2007

Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

Shum, P. W. / Tam, W. C. / Li, K. Y. et al. | British Library Online Contents | 2004

Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

Patscheider, J. / Diserens, M. / Levy, F. | British Library Online Contents | 1998

Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

Saoula, N. / Henda, K. / Kesri, R. | British Library Online Contents | 2009

Tantalum oxide films prepared by unbalanced reactive magnetron sputtering

Rao, N. R. / Chandramani, R. / Rao, G. M. | British Library Online Contents | 1999

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