Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering: Fid-Bau Portal

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Shen, Y. G. / Mai, Y. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Shen, Y. G. / Mai, Y. W.

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Shen, Y. G. / Mai, Y. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputtering

Contributors:

Shen, Y. G. (author) / Mai, Y. W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 76 ; 107 - 115

Publication date:

2000-01-01

Size:

9 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Polcar, T. / Parreira, N. M. / Cavaleiro, A. | British Library Online Contents | 2007

Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

Guruvenket, S. / Mohan Rao, G. | British Library Online Contents | 2004

Effect of silicon addition on surface morphology and structural properties of titanium nitride films grown by reactive unbalanced direct current-magnetron sputtering

Shen, Y. G. / Liu, Z.-J. / Jiang, N. et al. | British Library Online Contents | 2004

Copper Nitride Films Prepared by Reactive Radio-Frequency Magnetron Sputtering

Yuan, X.M. / Li, H.J. / Wei, Y. et al. | British Library Conference Proceedings | 2012

La-doped Copper Nitride Films Prepared by Reactive Magnetron Sputtering

Li, X. / Yang, J. / Zuo, A. et al. | British Library Online Contents | 2009