Hot-Implantation of Phosphorus Ions into 4H-SiC: Fid-Bau Portal

Hot-Implantation of Phosphorus Ions into 4H-SiC

Imai, S. / Kobayashi, S. / Shinohe, T. / Fukuda, K. / Tanaka, Y. / Senzaki, J. / Tanoue, H. / Kobayashi, N. / Okushi, H.

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Hot-Implantation of Phosphorus Ions into 4H-SiC

Imai, S. / Kobayashi, S. / Shinohe, T. / Fukuda, K. / Tanaka, Y. / Senzaki, J. / Tanoue, H. / Kobayashi, N. / Okushi, H.

Hot-Implantation of Phosphorus Ions into 4H-SiC

Imai, S. / Kobayashi, S. / Shinohe, T. / Fukuda, K. / Tanaka, Y. / Senzaki, J. / Tanoue, H. / Kobayashi, N. / Okushi, H.

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Document information

Title:

Hot-Implantation of Phosphorus Ions into 4H-SiC

Contributors:

Imai, S. (author) / Kobayashi, S. (author) / Shinohe, T. (author) / Fukuda, K. (author) / Tanaka, Y. (author) / Senzaki, J. (author) / Tanoue, H. (author) / Kobayashi, N. (author) / Okushi, H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 861-864

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Abe, K. / Ohshima, T. / Itoh, H. et al. | British Library Online Contents | 1998

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Negoro, Y. / Miyamoto, N. / Kimoto, T. et al. | British Library Online Contents | 2002

Ultrashort electron emission improved by alkali ions implantation into metallic photocathodes

Afif, M. / Girardeau-Montaut, J. P. / Tomas, C. et al. | British Library Online Contents | 1997

Ion implantation into GaN

Kucheyev, S. O. / Williams, J. S. / Pearton, S. J. | British Library Online Contents | 2001

Phosphorus diffusion in germanium following implantation and excimer laser annealing

Wang, C. / Li, C. / Huang, S. et al. | British Library Online Contents | 2014