Effect of NH~3 Post-Oxidation Annealing on Flatness of SiO~2/SiC Interface

Soejima, N. / Kimura, T. / Ishikawa, T. et al. | British Library Online Contents | 2013

Effect of Post-Oxidation Annealing on High-Temperature Grown SiO~2/4H-SiC Interface

Moon, J.H. / Cheong, K.Y. / Song, H.K. et al. | British Library Online Contents | 2009

Hydrogen redistribution in CVD SiO~2 during post-oxidation annealing investigated by SIMS

Kawashima, Y. / Kawano, H. / Terashima, K. et al. | British Library Online Contents | 2004

The Limits of Post Oxidation Annealing in NO

Rozen, J. / Zhu, X.G. / Ahyi, A.C. et al. | British Library Online Contents | 2010

Passivation of SiO2/4H–SiC interface defects via electron cyclotron resonance hydrogen–nitrogen mixed plasma pretreatment for SiC surface combined with post-oxidation annealing

Liu, Bingbing / Qin, Fuwen / Wang, Dejun | British Library Online Contents | 2016