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Characterization of 3C-SiC/SOI Deposited with HMDS
Characterization of 3C-SiC/SOI Deposited with HMDS
Characterization of 3C-SiC/SOI Deposited with HMDS
Planes, N. (Autor:in) / Aboughe-Nze, P. (Autor:in) / Ravetz, M. (Autor:in) / Contreras, S. (Autor:in) / Vicente, P. (Autor:in) / Chassagne, T. (Autor:in) / Fraisse, B. (Autor:in) / Camassel, J. (Autor:in) / Monteil, Y. (Autor:in) / Rushworth, S. (Autor:in)
MATERIALS SCIENCE FORUM ; 338/342 ; 599-602
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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