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Characterization of 3C-SiC/SOI Deposited with HMDS
Characterization of 3C-SiC/SOI Deposited with HMDS
Characterization of 3C-SiC/SOI Deposited with HMDS
Planes, N. (author) / Aboughe-Nze, P. (author) / Ravetz, M. (author) / Contreras, S. (author) / Vicente, P. (author) / Chassagne, T. (author) / Fraisse, B. (author) / Camassel, J. (author) / Monteil, Y. (author) / Rushworth, S. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 599-602
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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