Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering
Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering
Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering
Yokomichi, H. (Autor:in)
SURFACE ENGINEERING -LONDON- ; 16 ; 229-234
01.01.2000
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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