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    Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering

    New search for: Yokomichi, H.

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    Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering

    New search for: Yokomichi, H.

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    Access via TIB
    Check availability in my library
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    Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering

    New search for: Yokomichi, H.

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering

    Contributors:

    Yokomichi, H. (author)

    Published in:

    SURFACE ENGINEERING -LONDON- ; 16 ; 229-234

    Publication date:

    2000-01-01

    Size:

    6 pages

    ISSN:

    0267-0844

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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