Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
Microstructural properties of amorphous carbon nitride films synthesised by dc magnetron sputtering
Fitzgerald, A. G. (Autor:in) / Jiang, L. (Autor:in) / Rose, M. J. (Autor:in) / Dines, T. J. (Autor:in)
APPLIED SURFACE SCIENCE ; 175-176 ; 525-530
01.01.2001
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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