Annealing of ultrathin silicon dioxide layers plasma oxidized in ultrahigh vacuum

Majamaa, T. / Kilpela, O. / Novikov, S. et al. | British Library Online Contents | 1999

Contamination of Si surfaces in ultrahigh vacuum and formation of SiC islands

Xie, F. / von Blanckenhagen, P. / Wu, J. et al. | British Library Online Contents | 2001

Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation

Majamaa, T. / Kilpelae, O. / Novikov, S. | British Library Online Contents | 1998

Rectifying Self-Assembled Ultrathin Films

Cassagneau, T. P. / Sweryda-Krawiec, B. / Fendler, J. H. | British Library Online Contents | 2000

Formation of black silicon using SiGe self-assembled islands as a mask for selective anisotropic etching of silicon

Yurasov, D.V. / Novikov, A.V. / Shaleev, M.V. et al. | British Library Online Contents | 2018