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Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation
Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation
Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation
Majamaa, T. (Autor:in) / Kilpelae, O. (Autor:in) / Novikov, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 136 ; 17-21
01.01.1998
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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