Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC: Fid-Bau Portal

Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC

Pernot, J. / Bluet, J. M. / Camassel, J. / Di Cioccio, L.

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Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC

Pernot, J. / Bluet, J. M. / Camassel, J. / Di Cioccio, L.

Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC

Pernot, J. / Bluet, J. M. / Camassel, J. / Di Cioccio, L.

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Check availability in my library

Order at Subito €

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Document information

Title:

Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC

Contributors:

Pernot, J. (author) / Bluet, J. M. (author) / Camassel, J. (author) / Di Cioccio, L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 385-388

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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