Damage-to-dose ratio after low energy silicon ion implantation into crystalline silicon

Levin, Y. / Herbots, N. / Dunham, S. | British Library Online Contents | 1993

Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry

Hummel, R. E. | British Library Online Contents | 1998

Infrared Investigation of Implantation Damage and Implantation Damage Annealing in 4H-SiC

Pernot, J. / Bluet, J. M. / Camassel, J. et al. | British Library Online Contents | 2001

Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

Zolnai, Z. / Khanh, N. Q. / Lohner, T. et al. | British Library Online Contents | 2003

Zuhause in Neon

Hickey, D. | British Library Online Contents | 1999