Plasma etching of magnetic multilayers - effect of concurrent UV illumination

Cho, H. / Lee, K.P. / Hahn, Y.B. et al. | British Library Online Contents | 1999

Copper decoration and etching of crystal defects in SOI materials

Idrisi, H. / Kolbesen, B. O. | British Library Online Contents | 2009

Copper Etching: New Chemical Approaches

Hampden-Smith, M. J. / Kodas, T. T. | British Library Online Contents | 1993

Laser chemical etching of copper films [2403-34]

Aliouchouche, A. / Boulmer, J. / Debarre, D. et al. | British Library Conference Proceedings | 1995

Oblique Ion Etching for Copper at Elevated Temperature

Hino, T. / Kobayashi, T. / Yamauchi, Y. et al. | British Library Online Contents | 2011