Dry etching mechanism of copper and magnetic materials with UV illumination: Fid-Bau Portal

Dry etching mechanism of copper and magnetic materials with UV illumination

Hahn, Y. B. / Pearton, S. J. / Cho, H. / Lee, K. P.

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Dry etching mechanism of copper and magnetic materials with UV illumination

Hahn, Y. B. / Pearton, S. J. / Cho, H. / Lee, K. P.

Dry etching mechanism of copper and magnetic materials with UV illumination

Hahn, Y. B. / Pearton, S. J. / Cho, H. / Lee, K. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Dry etching mechanism of copper and magnetic materials with UV illumination

Contributors:

Hahn, Y. B. (author) / Pearton, S. J. (author) / Cho, H. (author) / Lee, K. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 79 ; 20 - 26

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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