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Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Low grain size TiN thin films obtained by low energy ion beam assisted deposition
Lopez, J. M. (author) / Gordillo-Vazquez, F. J. (author) / Bohme, O. (author) / Albella, J. M. (author)
APPLIED SURFACE SCIENCE ; 173 ; 290-295
2001-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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