Ge-doped SiO2 glass films prepared by plasma enhanced chemical vapor deposition for planar waveguides

Lee, J. W. / Kim, S. S. / Lee, B. T. et al. | British Library Online Contents | 2004

Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor

Jung, H. / Kim, W. H. / Oh, I. K. et al. | British Library Online Contents | 2016

Structural refinement of SnO2 thin film prepared by plasma-enhanced chemical vapor deposition

Kim, Y. I. / Nahm, S. H. / Jung, M. J. | British Library Online Contents | 2003

Plasma-enhanced chemical vapor deposition of PbTiO3 thin films

Tong, M. / Dai, G. / Gao, D. | British Library Online Contents | 2000

Structural and gas sensing properties of ultrafine Fe~2O~3 prepared by plasma enhanced chemical vapor deposition

Liu, Y. / Zhu, W. / Tan, O. K. et al. | British Library Online Contents | 1997