ZnO:Al Films Prepared by Reactive Mid-frequency Magnetron Sputtering with Rotating Cathode

Hong, R. / Xu, S. | British Library Online Contents | 2010

Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering

Hong, R. J. / Jiang, X. / Szyszka, B. et al. | British Library Online Contents | 2003

Effect of annealing temperature on properties of ZnO:Al thin films prepared by pulsed DC reactive magnetron sputtering

Liu, C. / Xu, Z. / Zhang, Y. et al. | British Library Online Contents | 2015

Characterization of ZnO:Al Films Deposited on Organic Substrate by r.f. Magnetron Sputtering

Ma, J. / Hao, X. / Zhang, S. et al. | British Library Online Contents | 2003

Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets

Zhu, H. / Hupkes, J. / Bunte, E. et al. | British Library Online Contents | 2012